Wang, Lei, Cao, Zhen Hua, Hu, Kun, She, Qian Wei and Meng, Xiang Kang#, Improved diffusion barrier performance of Ru/TaN bilayer by N effusion in TaN underlayer, Materials Chemistry and Physics, 2012, 135, 806-809

发布者：汪蕾发布时间：2022-05-24浏览次数：100

Wang, Lei, Cao, Zhen Hua, Hu, Kun, She, Qian Wei and Meng, Xiang Kang#, Improved diffusion barrier performance of Ru/TaN bilayer by N effusion in TaN underlayer, Materials Chemistry and Physics, 2012, 135, 806-809


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